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150/300mm Wafer Chucks

300mm Wafer Chuck the TI 950 Nanoindenter | Hysitron, Inc.
300mm Wafer Chuck | Hysitron, Inc.

150/300mm Wafer Chucks

Rapid Mounting and Testing of Full Wafers

Hysitron has developed multiple vacuum chucks to enable testing of full 150mm and 300mm processed wafers without the need for dicing. Every Hysitron vacuum sample stage is machined from non-magnetic stainless steel to tight tolerances in order to ensure uniform vacuum pressure under the entire wafer. Each stage has a series of independently operated concentric circles, allowing wafers of any size to be tested up to the maximum allowed by the vacuum stage.

Hysitron 150/300mm Wafer Chuck Features

  • Rapid mounting of whole wafers within the nanomechanical test instrument eliminates the need for dicing
  • Precision manufactured to minimize compliance variations across the wafer
  • Compatible with Hysitron’s Standalone Instruments
  • Independent concentric rings facilitate sample centering in the test machine and allows multiple size wafers to be tested
  • Valve assembly for vacuum on/off
  • Integrated tweezer or wafer wand slot for easy wafer mounting and removal

Contact Hysitron for additional information on 150/300mm Wafer Chucks