Vacuum Stage
There are several specially designed vacuum sample stages available for the TI-series of instruments. The vacuum sample stages are designed to securely hold large, flat samples during testing while eliminating the potential interference from magnetic sample holders. The use of a large vacuum platform allows an entire wafer or disc (up to 300mm with the TI-900/950 TriboIndenter system) to be tested with ease.
The smaller vacuum sample stage used with the TI-900/950 instrument is designed to accommodate a sample from a few millimeters across to 150mm. The vacuum sample stage available with the TI-700/750 instrument is designed to test four or five small samples (up to 1cm) with flat, smooth undersides. A major benefit of the vacuum sample stage is that there is no need to adhere samples to a steel (or magnetic) sample puck for testing as long as the underside is smooth and can maintain a firm vacuum.
The vacuum sample stage is designed to quickly and easily replace the standard sample stage of the TI-series instruments and is versatile enough to work with a range of samples.
The standard vacuum sample stage may be equipped with an optional external vacuum pump (produced by Hysitron) or connected to a house vacuum line through standard quick-connect tubing.