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Microtribology of Solid Lubricant Coatings for MEMS
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MEMS Slider Friction Characterization
Actuation of MEMS Devices with the Hysitron TriboIndenter®
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Full Nanomechanical Characterization of Ultra-Thin Films
Nanoindentation, Nanoscratch, and ScanningWear™ of TiN Thin Films on the TI 950 TriboIndenter®
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